Oxides beyond SiO2 for MOSFETs Publications

D.H. Choi, J.S. Harris, M. Warusawithana, and D.G. Schlom, “Annealing Condition Optimization and Electrical Characterization of Amorphous LaAlO3/GaAs Metal-Oxide-Semiconductor Capacitors,” Applied Physics Letters 90 (2007) 243505-1 – 243505-3.

M. Wang, W. He, T.P. Ma, L.F. Edge, and D.G. Schlom, “Electron Tunneling Spectroscopy Study of Amorphous Films of the Gate Dielectric Candidates LaAlO3 and LaScO3,” Applied Physics Letters 90 (2007) 053502-1 – 053502-3.

P. Sivasubramani, T.H. Lee, M.J. Kim, J. Kim, B.E. Gnade, R.M. Wallace, L.F. Edge, D.G. Schlom, F.A. Stevie, R. Garcia, Z. Zhu, and D.P. Griffis, “Thermal Stability of Lanthanum Scandate Dielectrics on Si(100),” Applied Physics Letters 89 (2006) 242907-1 – 242907-3.

J.M.J. Lopes, M. Roeckerath, T. Heeg, E. Rije, J. Schubert, S. Mantl, V.V. Afanas’ev, S. Shamuilia, A. Stesmans, Y. Jia, and D.G. Schlom, “Amorphous Lanthanum Lutetium Oxide Thin Films as an Alternative High-k Gate Dielectric,Applied Physics Letters 89 (2006) 222902-1 – 222902-3.

A. Stesmans, K. Clémer, V.V. Afanas’ev, L.F. Edge, and D.G. Schlom, “Nature and Stability of the (100)Si/LaAlO3 Interface Probed by Paramagnetic Defects,” Applied Physics Letters 89 (2006) 112121-1 – 112121-3.

V.V. Afanas’ev, A. Stesmans, R. Droopad, M. Passlack, L.F. Edge, and D.G. Schlom, “Electron Energy Barriers at Interfaces of GaAs(100) with LaAlO3 and Gd2O3,” Applied Physics Letters 89 (2006) 092103-1 – 092103-3.

L.F. Edge, D.G. Schlom, S. Rivillon, Y.J. Chabal, M.P. Agustin, S. Stemmer, T. Lee, M.J. Kim, H.S. Craft, J.-P. Maria, M.E. Hawley, B. Holländer, J. Schubert, and K. Eisenbeiser, “Thermal Stability of Amorphous LaScO3 Films on Silicon,” Applied Physics Letters 89 (2006) 062902-1 – 062902-3.

T. Heeg, J. Schubert, C. Buchal, E. Cicerrella, J.L. Freeouf, W. Tian, Y. Jia, and D.G. Schlom, “Growth and Properties of Epitaxial Rare-Earth Scandate Thin Films,” Applied Physics A 83 (2006) 103-106.

L.F. Edge, D.G. Schlom, P. Sivasubramani, R.M. Wallace, B. Holländer, and J. Schubert, “Electrical Characterization of Amorphous Lanthanum Aluminate Thin Films Grown by Molecular-Beam Deposition on Silicon,” Applied Physics Letters 88 (2006) 112907-1 – 112907-3.

V.V. Afanas’ev, A. Stesmans, L.F. Edge, D.G. Schlom, T. Heeg, and J. Schubert, “Band Alignment between (100) Si and Amorphous LaAlO3, LaScO3, and Sc2O3:  Atomically Abrupt versus Interlayer-Containing Interfaces,” Applied Physics Letters 88 (2006) 032104-1 – 032104-3.

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