Take a virtual tour of our lab
In Situ Characterization
- Angle-resolved photoemission spectroscopy (ARPES)
- Quartz Crystal Microbalance (QCM)
- Residual Gas Analyzer (RGA)
- Reflection High Energy Electron Diffraction (RHEED) with k-Space 400 system
- kSA Multi-beam Optical Sensor (MOS) for in situ thin film stress, wafer curvature, and thickness monitoring
- kSA BandiT - real time temperature monitoring system
Oxide Molecular-Beam Epitaxy System
Dual oxide MBE chamber
