Synthesis of Epitaxial TaO2 Thin Films on Al2O3 by Suboxide Molecular-Beam Epitaxy and Thermal Laser Epitaxy

Y.A. Birkhölzer, A.S. Park, N. Schnitzer, J.Z. Kaaret, B.Z. Gregory, T.A. Kraay, T. Schwaigert, M.R. Barone, B.D. Faeth, F.V.E. Hensling, I.C.G. van den Bosch, E.M. Kiens, C. Baeumer, E. Bergamasco, M. Grüninger, A.V. Bordovalos, S. Chaulagain, N.J. Podraza, W. Tokarz, W. Tabis, M.J. Wahila, S. Sarker, C.J. Pollock, S-L. Shang, Z-K. Liu, N. Artrith, F.M.F. de Groot, N.A. Benedek, A. Singer, D.A. Muller, and D.G. Schlom, “Synthesis of Epitaxial TaO2 Thin Films on Al2O3 by Suboxide Molecular-Beam Epitaxy and Thermal Laser Epitaxy,” APL Materials 14 (2026) 071106-1 – 071106-14.