Thin-Film Structure and Method of Manufacturing the Same

K. Lee, W. Lee, M. Jeong, Y. Kim, E. Kim, H. Mun, J. Lee, C. Lee, K. Cho, D.G. Schlom, C.J. Fennie, N.M. Dawley, G.H. Olsen, and Z. Wang, “Thin-Film Structure and Method of Manufacturing the Same,” U.S. Patent #11,133,179 B2, granted September 28, 2021.